Optical designers have been designing ultraviolet (UV) systems at wavelengths in the UV region for many years. With increasing demand for deep UV applications, special considerations that are not applicable to traditional visible optics must be taken to produce the optics. Specifically as the wavelength of incident light decreases, the importance of very smooth surfaces increases. The intent of this project is to increase the performance of UV optics in a four-phase project. The first phase consists of characterizing sub-surface damage using destructive methods to enable process control, the second phase (presented here) focuses on polishing methods, the third phase will include cleaning and possible etching protocols and the fourth phase will be improving thin film coating performance.
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